\u5728\u7535\u8def\u5236\u9020\u4e2d\uff0c\u5316\u5b66\u673a\u68b0\u629b\u5149(Chemical Mechani-cal Polishing,CMP)\u6280\u672f\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8e\u7845\u7247\u8868\u9762\u7684\u5c40\u90e8\u548c\u5168\u5c40\u5e73\u5766\u5316\u3002\u6839\u636eCMP\u8fc7\u7a0b\u7684\u6750\u6599\u53bb\u9664\u673a\u7406\uff0c\u7845\u7247\u8868\u9762\u6240\u4ea7\u751f\u7684\u5316\u5b66\u53cd\u5e94\u819c\u5c06\u7531\u78e8\u7c92\u548c\u629b\u5149\u57ab\u7684\u673a\u68b0\u6469\u64e6\u4f5c\u7528\u53bb\u9664,\u5bf9\u6b64\uff0cPreston\u65b9\u7a0b\u5df2\u7ecf\u5f88\u597d\u5730\u63cf\u8ff0\u8fd9\u4e00\u95ee\u9898\u3002\u78e8\u7c92\u5728\u7845\u7247\u8868\u9762\u7684\u8fd0\u52a8\u8f68\u8ff9\u5206\u5e03\u7684\u975e\u5747\u5300\u6027\uff0c\u4ee5\u53ca\u78e8\u7c92\u70b9\u5bf9\u7845\u7247\u5f84\u5411\u7684\u76f8\u5bf9\u6469\u64e6\u957f\u5ea6\u5728\u7845\u7247\u8868\u9762\u7684\u5206\u5e03,\u5c06\u53cd\u6620\u51fa\u7845\u7247\u8868\u9762\u6750\u6599\u53bb\u9664\u7684\u975e\u5747\u5300\u6027\u548c\u629b\u5149\u540e\u7845\u7247\u8868\u9762\u7684\u5e73\u9762\u5ea6\u8f6e\u5ed3\u3002\u78e8\u7c92\u5728\u7845\u7247\u8868\u9762\u4e0a\u7684\u8f68\u8ff9\u5206\u5e03\u53ca\u76f8\u5bf9\u6469\u64e6\u957f\u5ea6\u8d8a\u5747\u5300,\u5219\u8868\u9762\u6750\u6599\u53bb\u9664\u975e\u5747\u5300\u6027\u8d8a\u5c0f\uff0c\u5e73\u9762\u5ea6\u8bef\u5dee\u8d8a\u5c0f\u3002\u751f\u4ea7\u5b9e\u8df5\u8bc1\u660e\uff0c\u7845\u7247\u8868\u9762\u6750\u6599\u53bb\u9664\u8d8a\u5747\u5300\uff0c\u5219\u6240\u9700\u8981\u7684\u629b\u5149\u65f6\u95f4\u8d8a\u77ed\uff0c\u7845\u7247\u7684\u9762\u578b\u7cbe\u5ea6\u548c\u8868\u9762\u8d28\u91cf\u8d8a\u597d\u3002CMP\u8fc7\u7a0b\u4e2d\u7845\u7247\u8868\u9762\u6750\u6599\u53bb\u9664\u7684\u975e\u5747\u5300\u6027\u662f\u5f71\u54cd\u7845\u7247\u8868\u9762\u5168\u5c40\u5e73\u5766\u5316\u7684\u4e3b\u8981\u56e0\u7d20\u3002 \u968f\u7740\u96c6\u6210\u7535\u8def(IC)\u5236\u9020\u6280\u672f\u7684\u53d1\u5c55,IC\u7279\u5f81\u5c3a\u5bf8\u4e0d\u65ad\u51cf\u5c0f,\u5bf9\u7845\u7247\u8868\u9762\u9762\u578b\u7cbe\u5ea6\u7684\u8981\u6c42\u4e5f\u8d8a\u6765\u8d8a\u9ad8\u3002\u7136\u800c\uff0c\u76ee\u524d\u5bf9\u7845\u7247\u8868\u9762\u6750\u6599\u53bb\u9664\u7684\u975e\u5747\u5300\u6027\u673a\u7406\u7684\u8ba4\u8bc6\u8fd8\u4e0d\u6210\u719f,\u5982\u4f55\u51cf\u5c0fCMP\u8fc7\u7a0b\u4e2d\u7845\u7247\u8868\u9762\u6750\u6599\u53bb\u9664\u7684\u975e\u5747\u5300\u6027,\u4e00\u76f4\u662f\u4eba\u4eec\u6240\u5173\u5fc3\u7684\u95ee\u9898\u3002\u672c\u6587\u5bf9\u5e73\u9762\u955c\u9762\u629b\u5149\u673a\u8fdb\u884c\u4e86\u6709\u5173\u8fd0\u52a8\u6469\u64e6\u65b9\u9762\u7684\u5206\u6790\u3002<\/p>
1\u8fd0\u52a8\u6a21\u578b\u7684\u5efa\u7acb<\/p>
\u6446\u5f0f\u7ed3\u6784\u662f\u5e02\u573a\u4e0a\u5e73\u9762\u955c\u9762\u629b\u5149\u673a\u7684\u4e00\u79cd\u4e3b\u8981\u7ed3\u6784\uff0cAM Technology \u516c\u53f8\u3001SpeedFam \u516c\u53f8\u548c LapMaster \u516c\u53f8\u90fd\u6709\u6b64\u7c7b\u7ed3\u6784\u7684\u4ea7\u54c1\u3002\u672c\u6587\u5bf9\u5c0f\u578b\u6446\u5f0f\u7cbe\u5bc6\u7814\u78e8\u629b\u5149\u673a\u7684\u8fd0\u52a8\u8fdb\u884c\u5206\u6790\u3002\u8be5\u629b\u5149\u673a\u53ef\u5b9e\u73b0\u5404\u79cd\u7814\u78e8\u4e0e\u629b\u5149\u53c2\u91cf\u7684\u8fde\u7eed\u65e0\u7ea7\u8c03\u6574,\u5e76\u5b9e\u73b0\u7814\u78e8\u4e0e\u629b\u5149\u8fc7\u7a0b\u7684\u8fde\u7eed\u4fee\u6574\u3002\u901a\u8fc7\u66f4\u6362\u629b\u5149\u6216\u7814\u78e8\u76d8\u53ef\u4ee5\u5b9e\u73b0\u5355\u6676\u7845\u7247\u7684\u7814\u78e8\u4e0e\u629b\u5149\u4e24\u79cd\u529f\u80fdo\u56fe1\u548c\u88681\u5206\u522b\u662f\u6446\u5f0f\u629b\u5149\u4e0e\u7814\u78e8\u7684\u8fd0\u52a8\u539f\u7406\u53ca\u76f8\u5e94\u7684\u8fd0\u52a8\u53c2\u6570\u3002<\/p>
2\u5355\u6676\u7845\u7247\u7814\u78e8(\u629b\u5149)\u8fc7\u7a0b\u7684\u8fd0\u52a8\u4eff\u771f\u6a21\u62df<\/p>
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2.1\u78e8\u7c92\u8f68\u8ff9\u5f62\u6001\u7684\u5206\u6790<\/p>
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2.2\u5355\u6676\u7845\u7247\u8868\u9762\u7684\u6750\u6599\u53bb\u9664\u5206\u5e03<\/p>
Preston\u2476\u65b9\u7a0b\u662f\u63cf\u8ff0\u6676\u7247\u5728\u8fdb\u884c\u5316\u5b66\u673a\u68b0\u629b\u5149\u65f6\u8868\u9762\u6750\u6599\u5e73\u5747\u53bb\u9664\u7387\u5927\u5c0f\u7684\u6700\u57fa\u672c\u548c\u6700\u5178\u578b\u7684\u6a21\u578b\u4e4b\u4e00,\u5bf9\u4e8e\u6676\u7247\u8868\u9762\u968f\u673a\u70b9M\u7684\u6750\u6599\u53bb\u9664\u7387MRR,Preston\u65b9\u7a0b\u63cf\u8ff0\u4e3a\uff1a<\/p>
MRR=kpV………… \uff085\uff09<\/p>
\u5f0f\u4e2d:P\u548c\u300e\u5206\u522b\u4e3a\u629b\u5149\u70b9M\u5728t\u65f6\u523b\u6240\u53d7\u5230\u7684\u6cd5\u5411\u538b\u5f3a\u548c\u76f8\u5bf9\u901f\u5ea6\u6c60\u4e3aPreston\u65b9\u7a0b\u7684\u7cfb\u6570\u3002<\/p>
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3\u7ed3\u8bba<\/p>
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[1 ] Seok J, Sukam C P. Multiscale material removal model-<\/p>
ing of chemical mechanical polishing [ J ]. Wear, 2003<\/p>
\uff08245\uff09 \uff1a307 -320.<\/p>
[2] Preston F W. The theory and design of plate class polis-<\/p>
hing machine [ J]. Journal of the Society of Glass Tech-<\/p>
nology, 1927 \uff08 11 \uff09 \uff1a214 – 256.<\/p>
[3] Luo J F,Domfeld David A. Material removal mechanism<\/p>
in chemical mechanical polishing: theory and modeling<\/p>
[J]. IEEE Transaction semiconductor for manufactur-<\/p>
ing,2001,14(2)\uff1a112-133.<\/p>
[4] Shi F G, Zhao B. Modeling of chemical – mechanical<\/p>
polishing w\u8ba9h soft pads [ J]. Applied Physics a Materi-<\/p>
als Science & Processing, 1998 ( 67) \uff1a249 -252.<\/p>
[5] Liu C W,Dai B T,Tseng W T,et al. Modeling of the<\/p>
wear mechanism during chemical – mechanical polis-<\/p>
hing[ J]. Journal of the Electrochemical Society, 1996,<\/p>
143(2) \uff1a716-721.<\/p>
[6] Tso P L, Wang Y Y,Tsai M J. A study of carrier motion<\/p>
on a dual-face CMP machine [ J]. Journal of Materials<\/p>
Processing Technology,2001(116) : 194 -200.<\/p>
[7] Huang H C,Tsai Y H,Tsai M S. Effects of kinematic<\/p>
variables on non – unifbnnity in chemical mechanical<\/p>
planarization [ J ]. International Journal of Machine<\/p>
Tools & Manufacture,2000(40) : 1651 – 1669.<\/p>
[8 ] Uhimann E, Ardelt T. Influence of kinematics on the<\/p>
face grinding process on lapping machines [ J]. Annals<\/p>
of the CIRP,1999,48(1) \uff1a321 -324.<\/p>
[9] King J. Workpiece materials removal and lapping wheel<\/p>
wear in plane and plane – parallel lapping [ J]. Annals<\/p>
of the CIRP,1986,35(1) \uff1a219 -222.<\/p>
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10. \u65b0\u578b\u62cb\u5149\u673a<\/p>","protected":false},"excerpt":{"rendered":"
\u5728\u7535\u8def\u5236\u9020\u4e2d\uff0c\u5316\u5b66\u673a\u68b0\u629b\u5149(Chemical Mechani-cal 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